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genid67883
identifier
"
10.1021/acs.jpcc.5c05127
"
@default
.
genid67883
title
"
B. van der Linden et al., Ab Initio Insights into the Reactivity of Precursors in Atomic Layer Deposition: A Case Study of GeAsSe
"
@default
.
genid67883
type
Document
@default
.
